| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stencil mask having main struts and auxiliary struts and a manufacturing method of the same. <P>SOLUTION: The stencil mask includes a membrane forming thin film having a membrane region and boundary regions that define the membrane region. The membrane region has two or more pattern regions in which openings to allow charged particle beams to transmit are formed and non-pattern regions located therebetween. At the boundary regions of the membrane forming thin film, the main struts are formed to support the membrane region. At the non-pattern regions in the membrane region, the auxiliary struts are formed to divide the membrane region into two or more divided membrane regions. Each of the divided membrane regions is supported by the auxiliary strut. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
