| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus for a semiconductor device, for quickly and effectively radiating heat of a semiconductor device generating during a test, and for enabling correct test by keeping a test temperature constant without being influenced by the heat generating from the semiconductor device. SOLUTION: The inspection apparatus for a semiconductor device for testing durability of the semiconductor device against a temperature, comprises: a match plate; a contact module connected with the match plate, and having a radiating part radiating the heat generating from the semiconductor device to the outside and a test part for press-contact of lead wires of the semiconductor device; and an insert module disposed under the contact module, and having a semiconductor device housing part in which the semiconductor device is mounted. An auxiliary radiating member is disposed under the insert module to radiate the heat from the semiconductor device to the outside. COPYRIGHT: (C)2005,JPO&NCIPI
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