| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for preventing a wrapping-arround of a resist to a backside of a test smaple causing no scratch on the backside of the test smaple. <P>SOLUTION: When coating the resist on the surface of the test sample held on a rotating table and preventing the wrap-arround of the resin on the surface of the test sample, the sample is held on the rotating table at even gaps, a pressure of an inside of the gap is kept higher than that of an ouside, the wrap-around of the resist coated on the backside of the sample from a periphery area to the inner area of the backside of the sample is prevented. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
