| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of preventing a measuring circuit which is essentially a nondefective product from being wrongly determined to be a defective product owing to a leakage error, and executing excellently the inspection of a semiconductor integrated circuit in the state where an influence caused by the leakage error is removed to the utmost. SOLUTION: The setting of parameters such as sampling frequency and the number of discrete Fourier transform execution data, is changed by a prescribed algorithm, and sampling and the discrete Fourier transform are executed repeatedly. The values of the sampling frequency and the number of the discrete Fourier transform execution data by which the leakage error becomes lower than a prescribed level are found, and the inspection of the semiconductor integrated circuit is performed by using the values. COPYRIGHT: (C)2005,JPO&NCIPI
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