发明名称 BASE FOR MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a base for a microscope capable of realizing the improvement of the aligning accuracy of a microscope and the prevention of the blur of the microscope after the alignment. SOLUTION: The base 1 for the microscope is roughly bisected to a rack 2 on a floor side and a microscope placing part 13 on the microscope A side, and the placing part 13 is horizontally moved with respect to the rack 2. In the base 1, a bearing part 21 is embedded in the upper surface 17a of a top board 17. By supplying air to the bearing part 21 and making a rolling body 22 float in the midst of aligning the microscope A, a base board 16 floats and is freely moved with respect to the top board 17. Furthermore, when the position of the microscope A is decided, the placing part 13 is gradually lowered by gradually evacuating the air from the bearing part 21, and finally, the base board 16 is brought into contact with the top board 17, so that the top board 17 and the base board 16 are integrated and the blur of the microscope A after the alignment is prevented. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005017655(A) 申请公布日期 2005.01.20
申请号 JP20030181905 申请日期 2003.06.25
申请人 HAMAMATSU PHOTONICS KK 发明人 ISOBE YOSHIO;WATASE KURAJI;MATSUURA HIROYUKI
分类号 G01M11/04;G02B21/24;H01L21/66;(IPC1-7):G02B21/24 主分类号 G01M11/04
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