| 摘要 |
A wafer is irradiated with laser light having a wavelength which is transmitted through an inside of a crystal of the wafer and does not generate electromotive force due to photo-excitation while the laser light is scanned. When a temperature of the wafer is increased by the irradiation, thermo-electromotive force is generated in a crystalline abnormal part of the wafer by Seebeck effect. A defect inside the crystal is detected such that the thermo-electromotive force is detected by a change in voltage or current which appears between an anode and a cathode of the wafer and the thermo-electromotive force is displayed on CRT.
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