发明名称 |
VERTICAL HEAT TREATING EQUIPMENT |
摘要 |
<p>A vertical heat-processing apparatus (1) includes a vertical heat-processing furnace (2) having a furnace port (3), a lid (5) movable up and down to open and close the furnace port, and a rotation mechanism (15) disposed on the lid to rotate a holder (13) that holds a number of target substrates (W). The rotation mechanism (15) includes a rotary shaft (16), and a support unit (19) that supports the rotary shaft (16) rotatably through a bearing (17) and sealing member (18). The rotary shaft (16) has a hollow structure with a thin wall, and is supplied with a cooling gas to flow inside and outside the rotary shaft. The support unit (19) has a cooling passage (32) surrounding an upper portion of the rotary shaft (16), and is supplied with a coolant to flow through the cooling passage. <IMAGE></p> |
申请公布号 |
EP1498937(A1) |
申请公布日期 |
2005.01.19 |
申请号 |
EP20030715534 |
申请日期 |
2003.03.27 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
TOBA, KATSUYA;TAKAHASHI, KIICHI;OBARA, MITSURU |
分类号 |
H01L21/324;H01L21/22;H01L21/00;H01L21/205;H01L21/31;(IPC1-7):H01L21/205;H01L21/302 |
主分类号 |
H01L21/324 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|