| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp with improved luminous efficiency, using a metal plate with a number of adjacent pores perforated on an outer electrode, preventing unnecessary discharge between the outer electrode and an outside tube. SOLUTION: The outer electrode 7 is the metal plate 71 wound around the outer tube 3 with square pores perforated lengthwise and breadthwise in adjacency. Out of two pairs of opposed sides of the square pores, a direction of the two sides at one end is parallel with an axis direction of a discharge vessel 5, and that of the two sides at the other end is crossing the axis direction of the discharge vessel, and pore-less parts without any perforated square pores are provided at either end part of the metal plate in the axis direction along the axis direction of the discharge vessel. Further, a spring-like member 72a is fitted to each adjacent end of the metal plate wound around an outside face of the outer tube 3 to adhere and fix the metal plate to the outside face of the outer tube. COPYRIGHT: (C)2005,JPO&NCIPI
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