发明名称 METHOD OF COMPUTING COULOMB EFFECT IN CHARGED PARTICLE OPTICAL SYSTEM, COMPUTER PROGRAM, AND COMPUTER PROGRAM STORAGE MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method of accurately computing coulomb effect even in the charge particle optical system in which velocity and direction of the charged particles are changed to a large extent. SOLUTION: The electromagnetic field in which the charged particles are influenced is determined considering the influence of theory of relative, thereby obtaining the coulomb effect. Moreover, even in the case of obtaining the coulomb effect using the Tree-code method, the space is divided considering not only the spatial distribution of charged particles but also distribution of velocity thereof. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005011956(A) 申请公布日期 2005.01.13
申请号 JP20030173678 申请日期 2003.06.18
申请人 NIKON CORP 发明人 NIN TAKEAKI
分类号 G21K1/00;G21K5/04;H01J37/02;H01J37/04;H01J37/10;H01J37/21;H01L21/027;(IPC1-7):H01L21/027 主分类号 G21K1/00
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