摘要 |
PROBLEM TO BE SOLVED: To provide a method of accurately computing coulomb effect even in the charge particle optical system in which velocity and direction of the charged particles are changed to a large extent. SOLUTION: The electromagnetic field in which the charged particles are influenced is determined considering the influence of theory of relative, thereby obtaining the coulomb effect. Moreover, even in the case of obtaining the coulomb effect using the Tree-code method, the space is divided considering not only the spatial distribution of charged particles but also distribution of velocity thereof. COPYRIGHT: (C)2005,JPO&NCIPI
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