| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To make the contamination of an optical element mounted on a working head of a workpiece thermal processing machine detected much better. <P>SOLUTION: In a device for monitoring an optical element (4) of a working head of a workpiece thermal processing machine, such as a laser beam processing machine, with the form that monitoring is performed by detecting scattered light (10) in the optical element (4) and reference scattered light (17) at an additional optical element (3), scattered light (13) is made detected in a middle space (14) between the first optical element (3) and the second optical element (4). <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
