| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanning probe device capable of increasing a numerical aperture in a narrow diameter and performing scanning even in a depth direction. SOLUTION: In the device, light emitted from the tip surface of an optical fiber 13 inserted in the sheath 41 of an optical scanning probe 5A and fixed inside a tip frame body 31 is reflected at a convex mirror part of a variable shape mirror 56 capable of varying a focus distance, then reflected by a mirror device 57 which performs two-dimensional scanning, then converged by a converging lens 27 and focused at an observation point 26 inside an observation object 25 abutted to the tip surface of the tip frame body 31, and the light reflected at the observation point 26 is led through a reverse route to the tip surface of the optical fiber 13, photoelectrically converted through a photodetection means on the base end side and made into images. Thus, a high magnification and a large numerical aperture are attained by the converging lens 27 of a large diameter and a short focus and microscope images of excellent resolution are obtained. COPYRIGHT: (C)2005,JPO&NCIPI
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