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发明名称
ANTIREFLECTIVE SIO-CONTAINING COMPOSITIONS FOR HARDMASK LAYER
摘要
申请公布号
EP1495365(A1)
申请公布日期
2005.01.12
申请号
EP20030723925
申请日期
2003.04.01
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
PFEIFFER, DIRK;ANGELOPOULOS, MARIE;BABICH, KATHERINA;BROCK, PHILLIP;HUANG, WU-SONG;MAHOROWALA, ARPAN, P.;MEDEIROS, DAVID, R.;SOORIYAKUMARAN, RATNAM
分类号
G03F7/00;G03F7/11;G03F7/004;G03F7/038;G03F7/075;G03F7/09;G03F7/26;H01L21/027;H01L21/312;(IPC1-7):G03F7/00
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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