| 摘要 |
PROBLEM TO BE SOLVED: To provide a developer solution producing apparatus and a method thereof which accurately and quickly produce a developer solution of a desired concentration at the use side and can deal with many-kind small-lot substrate manufactures. SOLUTION: The developer solution producing apparatus 200 comprises a preparation tank 105 to which an original developer solution and pure water are fed, and a leveling tank 202 connected thereto and to a processing equipment for forming electronic circuits through a pipeline 114. A solution quantity control means 108 adjusts the developer solution quantity in the preparation tank 105, based on measurement signals from a solution quantity measuring means 106 and an alkali concentration measuring means 107; and a solution feed control means 109 adjusts the feed rate of the original developer solution, etc., to the preparation tank 105, thereby sending an alkaline developer solution with an adjusted alkali concentration to the leveling tank 202 and then feeding it to the processing equipment after leveling the alkali concentration. |
