APPARATUS AND METHOD FOR FORMING ALIGNMENT LAYERS

摘要

An object of the present invention is to provide an apparatus and method for ensuring a uniform orientation of liquid crystal molecules of an alignment layer by irradiation with ion beams. An apparatus of the present invention comprises a grid 11a having a plurality of ion ejection holes 30 of various sizes. The size of the ion ejection hole 30 varies depending on an ion density. The size of the ion ejection hole 30 increases with decrease in the ion density.