MICRO-ACTUATOR, MANUFACTURING METHOD FOR THE ACTUATOR, AND MICRO OPERATION VALVE

摘要

PROBLEM TO BE SOLVED: To provide a micro actuator manufacturable at a low cost and enabling micro driving with low voltage and low noises to efficiently control a flow rate. SOLUTION: This micro actuator comprises a first plate 110 in which a micro flow passage 111 is formed by cutting on one side and a second plate 120 which is fixed to the first plate 110 and in which a micro flow passage 121 is formed on one side so as to be communicated with the micro flow passage 111 in the first plate 110. The actuator also comprises a micro movable member 131 mounted on the upper surface of the second plate 120 so as to be connected to or separated from the micro flow passage side of the first plate 110, an electrode part 132 projectedly formed on both upper surface sides of the micro movable member 131 for supplying a power supply to the micro movable member 131, a plug 133 projectedly formed on the side wall of the micro movable member 131 so as to open and close the micro flow passage 121 in the second plate 120, and a micro driving means 130 formed of a plug suspension 134 elastically supporting the plug 133. COPYRIGHT: (C)2005,JPO&NCIPI