VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To effectively use oil discharged form a pump chamber. SOLUTION: The vacuum pump 1 discharges air sucked into the pump chamber from a discharge port 5 and discharges oil 10 injected into the pump chamber 2 from the discharge port 5. An injection nozzle 8 is connected to the discharge port 5, and the oil 10 is sprayed onto a drive mechanism 20 through the injection nozzle 8 and is used as lubrication oil for the drive mechanism 20. COPYRIGHT: (C)2005,JPO&NCIPI