| 摘要 |
PROBLEM TO BE SOLVED: To position a coating film thickness sensor to each point of measurement in the same locational relation from a center regardless of the dimensional accuracy and arrangement of a test piece at measurement on the film thickness of a coating pattern formed in the test piece. SOLUTION: The test piece (3) in which the coating pattern (P) is formed is placed on a stage (4). On the basis of image data captured by an imaging device (6), points of measurement (M<SB>n</SB>) are set at regular intervals in a two-dimensional coordinate system (x-y) for measurement with the center of the coating pattern (P) formed in the test piece as an origin. By computing the location of each points of measurement (M<SB>n</SB>) in a base coordinate system (X-Y) and positioning the film thickness sensor (5) at each point of measurement (M<SB>n</SB>), it is possible to measure film thickness data on each point of measurement (M<SB>n</SB>). COPYRIGHT: (C)2005,JPO&NCIPI
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