INFORMATION ACQUISITION METHOD FOR HEIGHT OF TEST PIECE

摘要

PROBLEM TO BE SOLVED: To find distance in the radiated direction of charged particles at high precision and at high speed. SOLUTION: The difference in height is found by carrying out fitting compensation process using a plurality of focal degree evaluating values in arbitrary parts, in which the positions are detected on a plane of a plurality of test piece images with different focal positions and carrying out detection of the focal position from the maximum value (minimum value) of obtained curves Pa and Pb. COPYRIGHT: (C)2005,JPO&NCIPI