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发明名称
Electrode configuration for pivotable MEMS micromirror
摘要
申请公布号
EP1479646(A3)
申请公布日期
2005.01.05
申请号
EP20040405316
申请日期
2004.05.21
申请人
JDS UNIPHASE INC.
发明人
MILLER, JOHN MICHAEL;MA, YUAN;KEYWORTH, BARRIE;JIN, WENLIN;HESS, DAVID R.
分类号
B81B3/00;G02B6/35;(IPC1-7):B81B7/02;B81B7/04;G02B26/08;B81B7/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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