VARIABLE TEMPERATURE PROCESSES FOR TUNABLE ELECTROSTATIC CHUCK,申请号EP20030728281-传众专利搜索

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发明名称	VARIABLE TEMPERATURE PROCESSES FOR TUNABLE ELECTROSTATIC CHUCK
摘要
申请公布号	EP1493180(A2)	申请公布日期	2005.01.05
申请号	EP20030728281	申请日期	2003.03.25
申请人	LAM RESEARCH CORPORATION	发明人	KAMP, TOM, A.;GOTTSCHO, RICHARD;LEE, STEVE;LEE, CHRIS;YAMAGUCHI, YOKO;VAHEDI, VAHID;EPPLER, AARON
分类号	H01L21/3065;H01L21/00;H01L21/311;H01L21/683;H01L21/768;(IPC1-7):H01L21/324;H01L21/68	主分类号	H01L21/3065
代理机构		代理人
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