Method of producing oxide soot using a burner with a planar burner face

摘要

A burner and a method for producing an inorganic soot such as silica comprising a plurality of substantially planar layers having multiple openings therethrough formed by a micromachining process. The openings are in fluid communication with a precursor inlet and a gas inlet to permit the gas and the precursor to flow through and exit the burner. The burner produces a flame from a combustible gas in which the precursor undergoes a chemical reaction to form the soot.