| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus having a cooling trap is provided to prevent a reverse flow of residues on an inner wall of a pipe by installing a valve on the cooling trap. CONSTITUTION: A semiconductor manufacturing apparatus having a cooling trap includes a reaction chamber(10), a cooling trap(30), and a pump. The cooling trap is coupled with the reaction chamber via a first pipe. The pump is coupled with the cooling trap via a second pipe. A plurality of valves(20a,20b,20c,20d) are installed on the first pipe(40a) and the second pipe(40b) at a side coupled with the cooling trap, respectively.
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