Method of forming semiconductor device,申请号US20040834836-传众专利搜索

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发明名称	Method of forming semiconductor device
摘要
申请公布号	US2004266143(A1)	申请公布日期	2004.12.30
申请号	US20040834836	申请日期	2004.04.30
申请人	CANON KK	发明人	HIGASHIKAWA MAKOTO
分类号	H01L21/205;C23C16/00;C30B1/00;H01L21/20;H01L21/36;H01L21/8242;H01L27/142;H01L31/04;H01L31/075;H01L31/18;H01L31/20;(IPC1-7):H01L21/824	主分类号	H01L21/205
代理机构		代理人
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