| 摘要 |
A method of reducing sound-induced vibrations in pellicles used in lithographic production of microelectronic features comprises providing a pellicle for protecting a photomask, monitoring background sound in the vicinity, or vibration, of the pellicle, providing opposing sound waves to the background sound, and causing the opposing sound waves to strike the pellicle to substantially cancel vibrations due to the background sound or vibration. When the background sound strikes the pellicle on one surface of the pellicle, the opposing sound waves may strike the pellicle on the opposing surface of the pellicle, and may be provided with substantially the same frequency and amplitude in the same phase to the background sound. Alternatively, opposing sound waves may strike the pellicle on the same surface of the pellicle as the background sound waves, may be provided with substantially the same frequency and amplitude in opposing phase to the background sound.
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