| 发明名称 |
3D micro-machining space projector for position determination, measurement and evaluation of micro-workpieces in a machining space of a micro-fabrication system, has an optical system appropriate for such a task |
| 摘要 |
<p>3D micro-machining space projector for position determination, measurement and evaluation of micro-workpieces in a machining space of a micro-fabrication system, The projector has a micro-objective (2) with a rod lens system (1), a photo-objective (6) and an imaging surface (7) arranged in a sequence.</p> |
| 申请公布号 |
DE202004013326(U1) |
申请公布日期 |
2004.12.23 |
| 申请号 |
DE20042013326U |
申请日期 |
2004.08.26 |
| 申请人 |
WULFSBERG, JENS PETER |
发明人 |
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| 分类号 |
G01B11/03;G02B23/24;(IPC1-7):G01B11/24;G03B21/00;G02B27/22 |
主分类号 |
G01B11/03 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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