发明名称 |
ALIGNMENT ROUTINE FOR OPTICALLY BASED TOOLS |
摘要 |
A method is provided for using a point of interest as a starting point where an alignment is automatically selected by recognition software for a patterned substrate. The method includes disposing the patterned substrate on a stage of an exposure system, the exposure system having an alignment routine including; locating a first point of interest on the patterned substrate; scanning a first area proximate the first point of interest for a first unique feature; defining a periodicity for the patterned substrate; locating a second point of interest based on the periodicity; scanning a second area proximate the second point of interest for a second unique feature corresponding to the first unique feature; gathering alignment data from at least scanning the first and second areas; and determining substrate position relative to the exposure system from alignment data of at least the first and second scanned areas.
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申请公布号 |
US2004257570(A1) |
申请公布日期 |
2004.12.23 |
申请号 |
US20030604010 |
申请日期 |
2003.06.20 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SEIPP STEVEN J. |
分类号 |
G01B11/00;G03F9/00;(IPC1-7):G01B11/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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