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发明名称
Methode und Apparat zur lokalen Temperaturmessung für hochauflösende in-situ Messung
摘要
申请公布号
DE69633841(D1)
申请公布日期
2004.12.23
申请号
DE19966033841
申请日期
1996.03.25
申请人
INTERUNIVERSITAIR MICROELECTRONICA CENTRUM VZW, LEUVEN-HEVERLEE;LIMBURGS UNIVERSITAIR CENTRUM, DIEPENBEEK
发明人
DE CEUNINCK, WARD;ROGGEN, JEAN;STALS, LAMBERT;DE SCHEPPER, LUC
分类号
G01R19/32;G01R31/01;G01R31/26;G01R31/28;(IPC1-7):G01R31/00
主分类号
G01R19/32
代理机构
代理人
主权项
地址
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