BAKE PLATE PROCESSING METHOD OF BAKE PROCESS FOR PREVENTING DEGRADATION OF SEMICONDUCTOR FABRICATION EFFICIENCY,申请号KR19980000559-传众专利搜索

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发明名称	BAKE PLATE PROCESSING METHOD OF BAKE PROCESS FOR PREVENTING DEGRADATION OF SEMICONDUCTOR FABRICATION EFFICIENCY
摘要
申请公布号	KR100464398(B1)	申请公布日期	2004.12.22
申请号	KR19980000559	申请日期	1998.01.12
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JUN, JIN HO;PARK, SI YEON
分类号	H01L21/324;(IPC1-7):H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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