发明名称 |
Illumination apparatus, projection exposure apparatus, and device fabricating method |
摘要 |
A light producing apparatus for irradiating a beam from a light source to a target to produce light having a wavelength different from the beam includes a first condensing optical system for condensing the beam from the light source, and an imaging optical system for imaging onto the target under a demagnification a condensing point of the beam by the first condensing optical system.
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申请公布号 |
US6833905(B2) |
申请公布日期 |
2004.12.21 |
申请号 |
US20020218855 |
申请日期 |
2002.08.13 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KOHNO MICHIO |
分类号 |
G03B27/54;G03F7/20;G03F7/22;H01L21/027;H01S3/00;(IPC1-7):G03B27/54;G03B27/42 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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