发明名称 CMOS thin film transistor and display device using the same
摘要 A CMOS thin film transistor and a display device using the same the CMOS thin film transistor has improved electrical characteristics, such as, current mobility and threshold voltage. The CMOS thin film transistor is fabricated such that the direction of active channels of the P-type thin film transistor and the direction of active channels of the N-type thin film transistor are different from each other, Primary grain boundaries included in the P-type thin film transistor are angled such that they are at an angle of about 60 to about 120° with respect to an active channel direction. Primary grain boundaries included in the N-type thin film transistor are angled such that they are at an angle of about -30° to about 30°. The active channels are formed in polycrystalline silicon.
申请公布号 US2004251463(A1) 申请公布日期 2004.12.16
申请号 US20040756393 申请日期 2004.01.14
申请人 PARK JI-YONG;KOO JAE-BON;PARK HYE-HYANG 发明人 PARK JI-YONG;KOO JAE-BON;PARK HYE-HYANG
分类号 H01L21/77;H01L21/84;H01L27/12;H01L29/04;H01L29/786;(IPC1-7):H01L29/76;H01L31/112 主分类号 H01L21/77
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