| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-versatility mass flow controller. SOLUTION: In a flow control valve 10, a flow sensor 40, a regulator 60, and a conduit body 13 are integrally constructed using a support member 30 and a clamp 55, and they are attachable/detachable to/from each other. COPYRIGHT: (C)2005,JPO&NCIPI
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