| 摘要 |
PURPOSE: A panel of a cathode ray tube and a method for manufacturing the panel using atomic layer deposition are provided to prevent contamination of the face of the panel and easily control the thickness of a coating film on the outer side of the panel by forming the coating film using atomic layer deposition. CONSTITUTION: A cathode ray tube includes a panel and a coating film formed on the outer face of the panel. The coating film is formed by introducing TDMAT(Tetrakis Dimethylamido-Titanium) gas to the outer face of the panel, purging with Ar gas, introducing NH3 gas such that the TDMAT gas and NH3 gas are chemically reacted with each other to form TiN layer serving as an anti-static layer, and then purging with Ar gas. Subsequently, SiH4 has is introduced and purging is carried out using Ar gas. H2O is introduced such that SiH4 gas and H2O are chemically reacted with each other to form SiO2 layer serving as an anti-reflection layer, and then purging is performed using Ar gas.
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