发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a nonvolatile semiconductor memory device with capacitance reduced between its floating gate electrodes, and to provide a method for manufacturing the same. SOLUTION: A polycrystalline silicon film 200 is buried between memory cells in the word-line direction, the polycrystalline silicon film 200 is applied with a potential, and the nonvolatile semiconductor memory device thus constructed is used. In this memory device, capacitance between floating gate electrodes FG is lowered for a reduction in capacitance between memory cells, and this reduces mutual interference between the memory cells. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004356428(A) 申请公布日期 2004.12.16
申请号 JP20030152922 申请日期 2003.05.29
申请人 TOSHIBA CORP 发明人 IGUCHI SUNAO;OTANI NORIO;TSUNODA HIROAKI;OKAJIMA MUTSUMI;NARITA KAZUHITO;IIZUKA HIROHISA;HAZAMA HIROAKI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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