Sample-setting moving stage, manufacturing apparatus for circuit pattern, and inspection apparatus for circuit pattern

摘要

To realize the temperature control of the sample-setting portion and enable to perform exposure or inspection of samples accurately while preventing the generation of dust, deterioration of the degree of vacuum and contamination in a vacuum atmosphere. (Means of Solving the Problems) The top table 21 or sample holding mechanism 7 is equipped with a temperature sensor 23, the flow path 251 of the heat-exchanging medium 241 is provided inside the non-moving fixed side guide member 181, and the temperature of the sample-setting portion is controlled through the control of the medium 241. Since the flow path 251 of the heat-exchanging medium 241 is located in a stationary portion, it is possible to control the temperature of the sample-setting portion while preventing the generation of dust due to flexible piping, damage to vacuum pump and contamination in a vacuum atmosphere caused by the heat-exchanging medium 241.