STRONTIUM TITANATE THIN FILM LAMINATE AND ITS FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To solve a problem that a bulk single crystal STO is a very useful dielectric body because of the practical use of superconduction or a hygenic device since the STO shows a high dielectric constant at low temperatures, but the STO has a fault that the dielectric constant is lowered when the STO is changed into a thin film and the fault has not been overcome up to the present date. SOLUTION: The STO film is constituted of first and second two-layered structure, and an interface of two layers is processed so as to be a chemically and mechanically ground (CMP) surface whereby a high dielectric constant can be obtained successfully even in the STO of a thin film. COPYRIGHT: (C)2005,JPO&NCIPI