发明名称 |
MASK RETAINING DEVICE |
摘要 |
The invention relates to a device for removably fixing a mask (1) in the form of a rectangular frame, on the legs (2, 3) of which clamping means are provided for gripping the edge (1') of the mask (1). According to the invention, the clamping means comprise a plurality of individual spring elements (4) which grip closely adjacent points on the mask edge (1'). The individual spring elements (4) which are assigned to one leg (2, 3) of the frame and are embodied as leaf springs (4) that are interconnected in a comb-type manner can be moved from a fitting position in which the frame can be fitted with the mask (1) into a clamping position by means of a common auxiliary clamping member (5). |
申请公布号 |
WO2004106580(A1) |
申请公布日期 |
2004.12.09 |
申请号 |
WO2004EP50389 |
申请日期 |
2004.03.29 |
申请人 |
AIXTRON AG;FRANKEN, WALTER;STRAUCH, GERHARD, KARL |
发明人 |
FRANKEN, WALTER;STRAUCH, GERHARD, KARL |
分类号 |
C23C14/04;G03F1/20;H01L21/68 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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