| 摘要 |
PROBLEM TO BE SOLVED: To provide an object processing device and an object processing method which realizes a process low in cost, low in damage, and mild in environment by suppressing any damage to a substrate in peeling and cleaning processes to the minimum. SOLUTION: On the object processing device for performing a processing including any of peeling/cleaning/machining for an object having an object surface to be processed, there are provided: a stage part for placing the object in the atmospheric pressure or a reduced pressure atmosphere; a pressure hot water supply part for supplying pressure hot water obtained by pressurizing pure water to a predetermined value to a nozzle part; and the nozzle part for spurting the pressure hot water or a mixture of the pressure hot water and a drug solution to the object surface to be processed. COPYRIGHT: (C)2005,JPO&NCIPI |
