| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card device that has no mutual interference between adjacent probes and can generate large press to an electrode. SOLUTION: The probe card 4 comprises a probe fixing plate 11 mounted on a multilayer interconnection board 15; a plurality of probe wires 14 that allow the rear end to be electrically connected to the multilayer interconnection board 15 and are stuck to the probe fixing plate 11; an elastic body 13, where the tip of the probe wire 14 projecting from the probe fixing plate 11 penetrates; and a frame 12 that is fixed to the probe fixing plate 11 and surrounds the periphery of the elastic body 13. When the tip of each probe wire 14 hits against the electrode 23 of an IC chip 21 and then is curved in a direction nearly perpendicular to the longitudinal direction, the elastic body 13 is deformed against the elastic force of the elastic body 13. COPYRIGHT: (C)2005,JPO&NCIPI
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