Heating medium circulating device and thermal, treatment equipment using the device

摘要

There is provided a heating medium circulating apparatus which is small and which does not require a very large installation space. In a heating medium circulating apparatus wherein a temperature controlling object being an object to be temperature-controlled, a main heat exchanger 88 for carrying out main heat exchange with a heating medium, and a circulating pump 84 are provided in a heating medium circulating system 78, a sub-heat exchanger 96 using a thermoelectric element 100 is provided in the heating medium circulating system downstream of the main heat exchanger to control the temperature of the heating medium. Thus, the apparatus itself is small, and the installation space is not very large.