| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive dynamical quantity sensor capable of reducing damping. SOLUTION: In the capacitive acceleration sensor 1 which is equipped with movable electrodes 11 and 12 extending from the side of a weight part 13 and integrally formed and fixed electrodes 21 and 31 having detection surfaces disposed opposite detection surfaces of the movable electrodes 11 and 12 and which detects the acceleration from the capacitive change between the detection surfaces, a groove part 40 penetrating through from the detection surface to the opposite surface and also having a prescribed depth from the upper surface or the lower surface of the electrode is provided at at least a part of the movable electrodes 11 and 12 and the fixed electrodes 21 and 31. Accordingly, when the movable part 10 is displaced by the application of the acceleration, the damping between the detection surfaces can be reduced, because a fluid existing between the detection surfaces can flow in or out through the groove part 40. COPYRIGHT: (C)2005,JPO&NCIPI |
