| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus, capable of carrying in/out a substrate with respect to each processing part, and of eliminating the reassembling and readjustment of a substrate loading means in the transfer of the apparatus, even if the substrate-processing apparatus is high in height. SOLUTION: A transfer robot TR1 forms an expansion lifting mechanism of the so-called "telescopic multiple step type structure". A drive mechanism D1 drives a support member 48 for rising, and a lifting member 42d to rise, at the same time. When the lifting member 42d rises, a pulley 47c rises at the same time. If the pulley 47c rises, the lifting member 42c rises, in such a manner that it is raised by a belt L1. Transfer arms 31a, 31b, installed at upper side of the lifting member 42a, rise by the same actions as mentioned. If the number of the multiple step type structure is increased, the height of the transfer robot TR1 at housing will not increase, and reassembly and readjustment of the transfer robot TR1 also become unnecessary at the transfer of the equipment. COPYRIGHT: (C)2005,JPO&NCIPI
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