LITHOGRAPHIC PROJECTION APPARATUS WITH CONDENSER INCLUDING CONCAVE FACE AND CONVEX FACE

摘要

PROBLEM TO BE SOLVED: To provide a lithographic projection apparatus in which an ML condenser has been substituted by a condenser that can form a radiation beam by collecting a radiated light within a solid angle which is equivalent to the solid angle within which the ML condenser collects the radiated light. SOLUTION: The lithographic apparatus to be disclosed includes a radiation source that emits the radiated light and at least one condenser (59; 63; 73) that collects the radiated light by being arranged close to the radiation source (51) and forms a radiated beam (52). The at least one condenser includes a first reflector on a concave-face mirror (53) and a second reflector on a convex-face mirror (55). The concave-face mirror (53) is arranged surrounding the convex-face mirror (55). The first reflector on the concave-face mirror (53) receives the radiated light from the radiation source (51). The first reflector reflects the received radiated light toward the second reflector on the convex-face mirror (55) to form a beam of the radiated light (52). COPYRIGHT: (C)2005,JPO&NCIPI