发明名称 CONTAMINANT DEPOSITION CONTROL BAFFLE WITH CAPACITANCE DIFFERENCE PRESSURE TRANSDUCER
摘要 <p>A deposition controlling baffle (250) is (additionally) provided. Its apertures conduct contaminants to regions of a membrane (160) of inner capacitor (127a) and outer capacitor (127b) so that the difference will cancel the effect of contaminants. Instead of eliminating contaminants as much as possible from reaching diaphragm (160) the above baffle (250) steers contaminants to the diaphragm (160) in a predetermined pattern so as to minimize the effect that such contaminants can have on performance of the transducer.</p>
申请公布号 WO2004104543(A1) 申请公布日期 2004.12.02
申请号 WO2004US14639 申请日期 2004.05.10
申请人 MKS INSTRUMENTS, INC.;LISCHER, JEFFREY, D.;TRAVERSO, ROBERT 发明人 LISCHER, JEFFREY, D.;TRAVERSO, ROBERT
分类号 G01L9/00;G01L19/06;(IPC1-7):G01L19/06;C23C16/00;G01L9/12;H01L21/00 主分类号 G01L9/00
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