CONTAMINANT DEPOSITION CONTROL BAFFLE WITH CAPACITANCE DIFFERENCE PRESSURE TRANSDUCER
摘要
<p>A deposition controlling baffle (250) is (additionally) provided. Its apertures conduct contaminants to regions of a membrane (160) of inner capacitor (127a) and outer capacitor (127b) so that the difference will cancel the effect of contaminants. Instead of eliminating contaminants as much as possible from reaching diaphragm (160) the above baffle (250) steers contaminants to the diaphragm (160) in a predetermined pattern so as to minimize the effect that such contaminants can have on performance of the transducer.</p>
申请公布号
WO2004104543(A1)
申请公布日期
2004.12.02
申请号
WO2004US14639
申请日期
2004.05.10
申请人
MKS INSTRUMENTS, INC.;LISCHER, JEFFREY, D.;TRAVERSO, ROBERT