发明名称 |
METHOD AND SYSTEM FOR EJECTING LIQUID DROPLET, METHOD FOR FORMING FILM PATTERN, DEVICE AND ITS FABRICATING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for ejecting liquid droplets capable of enhancing the processing capacity by suppressing the decline of the rate of operation of an ejection head incident to the determination of the ejecting conditions. SOLUTION: A liquid droplet ejection system IJS comprises an ejection head 1 for ejecting a liquid material. Information concerning the liquid droplet of the liquid material is measured using a test ejection head 26 having characteristics identical to those of the ejection head 1 and ejecting conditions of the ejection head 1 are determined for the liquid material based on the measurements. COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2004342919(A) |
申请公布日期 |
2004.12.02 |
申请号 |
JP20030139196 |
申请日期 |
2003.05.16 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MORIYAMA HIDEKAZU |
分类号 |
B05D1/26;B05C5/00;B05C11/10;H01L21/027;H01L21/288;H01L21/3205;(IPC1-7):H01L21/027;H01L21/320 |
主分类号 |
B05D1/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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