摘要 |
PROBLEM TO BE SOLVED: To provide a method of decreasing the variation in the resonance frequency of a vibration mirror and a method of broadening the absorption range of the variation, in a driving frequency in an optical scanner which has the vibration mirror having a mirror face which reflects a light beam and a pair of torsion beams which pivotally support the vibration mirror freely oscillatably. SOLUTION: The device has such a structure that the pressure in the oscillating space of the vibration mirror is adjusted and the space is sealed so that the characteristic of the vibration mirror is controlled in a predetermined range. Further, if necessary, the pressure is adjusted by a gas absorption agent (008) and a gas releasing agent (009). COPYRIGHT: (C)2005,JPO&NCIPI
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