| 摘要 |
PROBLEM TO BE SOLVED: To make the luminous flux diameter of a secondary light source surface small without degrading the illuminance uniformity at a surface to be irradiated of an illumination optical system using a lens array as an optical integrator. SOLUTION: At least a part of a lens cell among a plurality of the lens cells of the first lens array 13 on a light source side is formed with a face on the opposite side of the lens face as a flat inclined face having an angle with a face perpendicular to the optical axis. The incident light on the first lens array 13 is refracted by the inclined face and is emitted from the first lens array 13, by which the luminous flux made incident on the first lens array 13 is made incident on the second lens array 14 on the side of the surface to be irradiated while its diameter is reduced after the emission. The rays made incident on each one lens cell of the second lens array 14 are emitted from≥1 cells of the first lens array 13. The first lens array 13 surely has the cells of the second lens array 14 to be paired therewith and each one constitutes one condensing system. COPYRIGHT: (C)2005,JPO&NCIPI
|
