CAPACITY CELL AND SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THEM

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device wherein the reinforcement of a high-drive cell power source is made possible by decreasing voltage drops in feeder lines and by suppressing or reducing circuit size enlargement, and to provide a method of designing the same. SOLUTION: A capacity cell 10 for noise reduction in a high-drive cell or the like has vias 13, 14 for feeding power from upper-layer wiring layers 17, 18 to wiring layers 15, 16 arranged in the capacity cell region upper layer, and the resistance of the feeder lines is made to be reduced. COPYRIGHT: (C)2005,JPO&NCIPI