| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferrite thin film showing a high magnetic permeability in high frequency band by controlling the texture of the ferrite film and increasing the industrial productivity by enhancing its generation speed, and its manufacturing method. SOLUTION: This ferrite thin film is a Ni/Zn type ferrite mainly containing Ni, Zn, Fe, and O, and the Cole-Cole plot of its complex impedance comprises an arc, and a straight line connecting the center of the arc and the origin of the coordinates and the horizontal axis form an angle not smaller than 2.5°. COPYRIGHT: (C)2005,JPO&NCIPI
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