| 摘要 |
The described embodiments relate to laser micromachining a substrate (104). One exemplary embodiment includes a chamber (114) configured to receive an assist gas from an assist gas source. The chamber (114) is configured to allow a laser beam (108) to pass through the chamber (114) to contact a substrate (104) positioned outside of the chamber (114). The laser machine also includes a nozzle plate (202) positioned in gas receiving relation with the chamber (114), the nozzle plate (202) having at least one nozzle opening (204) formed therein, wherein the at least one nozzle opening (204) is substantially coincident a footprint of a feature (206) desired to be formed in the substrate (104). |
