METHOD FOR PREVENTING ADHESION OF CONTAMINATING PARTICLE TO SURFACE OF MICROCOMPONENT, MICROCOMPONENT STORAGE DEVICE AND THIN LAYER DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for reducing the risk of contamination of a free surface of a microcomponent placed inside a vacuum chamber by sticking a parasitic particle.

SOLUTION: In the method, sputtering of a particle beam (8) is performed between a contaminating particle source (5) and the microcomponent (2). At least a portion of particles in the beam (8) has a polarity opposite of that of the contaminating particle (7). The particle beam (8) is preferably plasma and moves the contaminating particle (7) from the free surface of the microcomponent toward a particle collector (10). A microcomponent storage device and a thin layer deposition device for the above method are also provided.

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